Litho Process Laurell Litho Bay & Hot Plate/Oven - Status: Available

Description: The Litho Bay Laurell Spinner is used to manually apply SU8 and LOR ONLY. NO OTHER MATERIALS MAY BE USED.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryJun 1, 2021 - Resource Status Up - entire vacuum path and vac valve filled with lor and nlof. cleaned everything and reconnected vac sensor line to transducer.

Description: The Litho Bay Laurell Spinner is used to manually apply SU8 and LOR ONLY. NO OTHER MATERIALS MAY BE USED.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.