Litho Process Laurell Litho Bay & Hot Plate/Oven - Status: Available

Description: The Litho Bay Laurell Spinner is used to manually apply SU8 and LOR ONLY. NO OTHER MATERIALS MAY BE USED.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

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Microfabrication wiki linkLatest Status Log EntryJan 19, 2021 - Resource Status Up - up . new keypad installed

Description: The Litho Bay Laurell Spinner is used to manually apply SU8 and LOR ONLY. NO OTHER MATERIALS MAY BE USED.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.