Asher - Tepla M4L - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $67.50/Hour
    • External Affiliated Commercial/Industrial: $67.50/Hour
    • External Commercial/Industrial: $90.00/Hour
    • External International Academic: $90.00/Hour
    • Internal Standard: $45.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 The MetroLine/IPC M4L Plasma Processing System is a batch-mode plasma system for etch, strip,clean, and surface treatment.

Plasma Ashing wiki link
Microfabrication wiki link
Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Capabilities Training Prerequisites Calendar Contacts Docs

Gases include Oxygen, CF4 and Argon. The M4L generates a low pressure, low temperature gaseous plasma. Up to 600W RF energy is applied to a set of electrodes to separate some of the gas molecules inside the chamber into chemically reactive atoms, ions, and free radicals.

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