Asher - Tepla M4L - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $67.50/Hour
    • External Affiliated Commercial/Industrial: $67.50/Hour
    • External Commercial/Industrial: $90.00/Hour
    • External International Academic: $90.00/Hour
    • Internal Standard: $45.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
The MetroLine/IPC M4L Plasma Processing System is a batch-mode plasma system for etch, strip,clean, and surface treatment.

Plasma Ashing wiki link
Microfabrication wiki link
Latest Status Log EntryMay 17, 2024 - Resource Status Up - up. installed and connected new throttle valve. had issue with throttle setting in software and will require advantech driver setup to control throttle valve. backup up hd to rsc backup hd. converted tool to ssd drive. old hd inside tool

Gases include Oxygen, CF4 and Argon. The M4L generates a low pressure, low temperature gaseous plasma. Up to 600W RF energy is applied to a set of electrodes to separate some of the gas molecules inside the chamber into chemically reactive atoms, ions, and free radicals.

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