Asher - Tepla M4L - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $67.50/Hour
    • External Affiliated Commercial/Industrial: $67.50/Hour
    • External Commercial/Industrial: $90.00/Hour
    • External International Academic: $90.00/Hour
    • Internal Standard: $45.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 The MetroLine/IPC M4L Plasma Processing System is a batch-mode plasma system for etch, strip,clean, and surface treatment.

Plasma Ashing wiki link
Microfabrication wiki link
Latest Status Log EntryApr 22, 2024 - Resource Status Up - fuse replaced and tool is back up
Capabilities Training Prerequisites Calendar Contacts Docs
Training TopicDescriptionRatesApprox Session Length (hrs)
Tepla Asher M4L TrainingStandard Rate: $19.00/Complete User TrainingN/A

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