Asher - Tepla M4L - Status: Available
|
The MetroLine/IPC M4L Plasma Processing System is a batch-mode plasma system for etch, strip,clean, and surface treatment.
Plasma Ashing wiki link Microfabrication wiki link Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up |
Contact Level | Name | |
---|---|---|
1 | Lewis, Bill | walewis@ufl.edu |
2 | Hays, David | dhays@nimet.ufl.edu |
General Contact: rscinfo@mail.ufl.edu
An active Gatorlink login is required to create a new reservation.