ALD - Cambridge Nano Fiji 200 - Status: Available

  • Current Status: Available
  • Use Rates:
    • External Academic & Government: $135.00/Run
    • External Affiliated Commercial/Industrial: $135.00/Run
    • External Commercial/Industrial: $180.00/Run
    • External International Academic: $180.00/Run
    • Internal Standard: $90.00/Run
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Brent Gila
Cambridge Nano Fiji 200 - ALD system with thermal, plasma, and exposure (allows for deposition in high aspect ratio features) deposition capabilities.

Atomic Layer Deposition wiki link
Microfabrication wiki link
Latest Status Log EntryMar 6, 2020 - User Note: Plasma HZO 62 cycles Plasma TiN 200 cycles The transfer arm magnet needs to be calibrated. I had difficulty in unloading the sample at defined magnet rotation.

Cambridge Nano Fiji 200 - A loadlocked ALD system with thermal and plasma deposition capabilities, 5 metal-organic precursors and up to 8" wafer sample size. The system is capable of operating in "exposure mode" which allows for deposition in high aspect ratio features.

Available Recipes: Al2O3, HfO2, AlN, Pt, Ru, TiN, TiO2, ZrO2 and SiO2.

Charge rate is per ALD run (24hr.) plus the precursor used for that run.
ALD Precursors Surcharge

Current precursors loaded:
1-Hf Valve open
2-Al Valve open
3-Zr Valve open
4-Pt Valve open
5-Ti Valve open

NOTE: Precursor changes need to be notified 48h in advance.