ALD - Cambridge Nano Fiji 200 - Status: In Use
  • Current Status: In Use
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $139.50/Run(24h)
    • External Affiliated Commercial/Industrial: $139.50/Run(24h)
    • External Commercial/Industrial: $186.00/Run(24h)
    • External International Academic: $186.00/Run(24h)
    • Internal Standard: $93.00/Run(24h)
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Andres Trucco
 Cambridge Nano Fiji 200 - ALD system with thermal, plasma, and exposure (allows for deposition in high aspect ratio features) deposition capabilities.

Atomic Layer Deposition wiki link
Microfabrication wiki link
Plasma-ald and ALD resources
Latest Status Log EntryApr 18, 2024 - User Note: Running 4 calibration runs. All plasma mode 200C HfO2 300 OK ZrO2 300 OK HZO 150 cycles HZO with H2 pulse 150 cycles. all runs on Si substrate.
Capabilities Training Prerequisites Calendar Contacts Docs

To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)

Reservation Notes

Please do not reserve more than 72 hours cumulatively for calendar week. This will allow other ALD members the opportunity to create reservations for tool access.

Please do not use the ALD tool as 'sample storage', remove your samples when your run is complete.

Precursor change request must be made 24h in advance via email.

Calendar ICS Path

An active Gatorlink login is required to create a new reservation.