ALD - Cambridge Nano Fiji 200 - Status: Available
||Cambridge Nano Fiji 200 - ALD system with thermal, plasma, and exposure (allows for deposition in high aspect ratio features) deposition capabilities.
Atomic Layer Deposition wiki link
Microfabrication wiki link
Plasma-ald and ALD resources
Latest Status Log EntryNov 16, 2023 - User Note: Removed and weight SiO2 precursor. Bottle empty. New precursors on order from two vendors.
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