FIB - FEI Helios G4 PFIB CXe dual beam FIB/SEM - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $97.50/Hour
    • External Affiliated Commercial/Industrial: $187.50/Hour
    • External Commercial/Industrial: $250.00/Hour
    • External International Academic: $130.00/Hour
    • Internal Standard: $50.00/Hour
  • Building: NANO (0070)
  • Room: Dual-Beam Fib (132)
  • Room Max Occupancy: 3
  • In Cleanroom: No
  • Main Contact: Nicholas Rudawski

The FEI Helios G4 PFIB CXe DualBeam system integrates focused ion and scanning electron beams for FIB and SEM functionality in one instrument.

Instrument Specifications:

  • Schottky field emission gun Elstar UC+ SEM column; 0.3 - 30 kV operating voltage with <1 nm resolution
  • Xe plasma source FIB
  • Plasma FIB 2.0 column with 2 - 30 kV operating voltage
  • In-situ Pt deposition
  • In-situ C deposition
  • EasyLift in-situ micromanipulator
  • EDAX Octane Elite (70 mm squared active area) SDD EDS
  • EDAX Velocity EBSD camera
  • EDAX OIM 8 Analysis software

  • Zoom workshop on dual beam FIB/SEM tips, tricks, and other useful info (recorded 11/19/21)


    1. You must create an RSC user account with a PI-approved funding source.

    2. You must complete RSC general safety training.

    3. You must complete the FIB Knowledge Training course through eLearning; submit a training request using the "Training" link at the bottom of the page and follow the instructions to be added to the course; you must complete this course regardless of any prior coursework or operational experience related to SEM or FIB you may have.

    Latest Status Log EntryOct 29, 2021 - User Note: New EasyLift needle installed and sharpened; should last ~100 liftouts with proper use and care

  • Nanoscale compositional analysis using EDS
  • Texture and crystallographic analysis using EBSD