The XPS uses X-rays to determine the elements present in the top 3-4 atomic layers on a solid surface. All elements can be detected as well as their chemical state on the surface layer. Electrically conducting, semi conducting or insulating samples can be examined in an ultra high (10E-9 torr) vacuum . The technique is also sometimes known as Electron Spectroscopy for Chemical Analysis (ESCA). The Perkin-Elmer PHI 5100 uses either Mg or Al non monochromatic x-ray to flood the surface of the sample and examine an area 10 mm x 4 mm in size. The surface can be tilted for a non-destructive angle resolved depth profile over the escape depth of the photoelectrons present. An Ar ion gun is also available for surface cleaning of contaminants.

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