Oven, YES, Image Reversal/HMDS - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $24.75/Hour
    • External Affiliated Commercial/Industrial: $24.75/Hour
    • External Commercial/Industrial: $33.00/Hour
    • External International Academic: $33.00/Hour
    • Internal Standard: $16.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Photolithography (165)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 YES Oven - Image Reversal or HMDS application

Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryJan 5, 2023 - User Note: hdms mode, test wafers
Capabilities Training Prerequisites Calendar Contacts Docs
Title
Equipment ImageDownload
Liftoff - S1813 Image ReversalDownload
NRF Lithography Processes SOPDownload
Oven, YES, Image Reversal/HMDS SOPDownload

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