Profilometer, Dektak 150 - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $66.00/Hour
    • External Affiliated Commercial/Industrial: $66.00/Hour
    • External Commercial/Industrial: $88.00/Hour
    • External International Academic: $88.00/Hour
    • Internal Standard: $44.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: David Hays
The Dektak 150 is a highly sensitive stylus profilometer. A diamond-tipped stylus is moved laterally across the surface while in contact and measures deflections of the tip. It can be used to measure step heights (film thickness), surface roughness, waviness and stress. The vertical measuring range is 1mm and can perform a line scan as long as 55mm. Vertical resolution is 1A max, using the 6.55um range and the stylus force can be varied from 0.03mg to 15mg. The Dektak can accommodate wafers up to 150mm and features a motorized X-Y stage.

Profilometer wiki link Latest Status Log EntryJan 3, 2022 - Resource Status Up - tool is back up from break

Use Prerequisites

PrerequisiteDescription
Computer AccessRequires computer access be setup
Funding SourceRequires permission to an active funding source
Work PlanRequires a work plan be approved by PI and staff
Agreement FormRequires completed agreement form for equipment usage
RSC Safety TrainingRequires completion of safety training
NRF Building AccessRequires issue of an id badge and entry badge and/or access level to be set.
Equipment TrainingRequires completion of equipment training

View your prerequisite status for the Profilometer, Dektak 150.