Profilometer, Dektak 150 - Status: Available
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The Dektak 150 is a highly sensitive stylus profilometer. A diamond-tipped stylus is moved laterally across the surface while in contact and measures deflections of the tip. It can be used to measure step heights (film thickness), surface roughness, waviness and stress. The vertical measuring range is 1mm and can perform a line scan as long as 55mm. Vertical resolution is 1A max, using the 6.55um range and the stylus force can be varied from 0.03mg to 15mg. The Dektak can accommodate wafers up to 150mm and features a motorized X-Y stage.
Profilometer wiki link Latest Status Log EntryAug 31, 2023 - Resource Status Up - back online |
Use Prerequisites
| Prerequisite | Description | Status |
|---|---|---|
| Computer Access | Requires computer access be setup | Check Your Status |
| Funding Source | Requires permission to an active funding source | Check Your Status |
| Work Plan | Requires a work plan be approved by PI and staff | Check Your Status |
| Agreement Form | Requires completed agreement form for equipment usage | Check Your Status |
| RSC Safety Training | Requires completion of safety training | Check Your Status |
| NRF Building Access | Requires issue of an id badge and entry badge and/or access level to be set. | Check Your Status |
| Equipment Training | Requires completion of equipment training | Check Your Status |
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