Nanoscale Research Facility (NRF)

The Nanoscale Research Facility service center was created to provide a state-of-the-art facility for: university research in micro/nano device fabrication, teaching laboratories associated with micro/nano fabrication, and a collaborative, open environment. The NRF currently houses a 7,000+ sq. ft. clean room class 100-1000 with over 60 fabrication and inspection related tools with a purchase cost of over $8M. The facility and its resources are available to the entire university community and provide an excellent foundation for current research and grant proposals.

NRF Tool List


To become a user and schedule training on NRF equipment, please visit the RSC become a user page.


To request service, please visit the RSC become a user page.


Inquiry Form

< Return to About RSCs