4 Point Probe Station - Status: Available
||The VEECO FPP-5000 4-point probe simplifies the measurement of resistive properties of
semiconductor wafers and resistive films. The microprocessor based electronics permits direct
computation of V/I, sheet or slice resistivity, and metallization thickness and P-N type testing.
Unlike most four point probes and probing stations, which move the probe head into the wafer,
the FPP-5000 is designed so that the wafer is moved into the probe head. This insures constant
probe force independent of operator force and wafer thickness.
4 pt probe wiki linkLatest Status Log EntryOct 3, 2022 - Resource Status Up - restarted after hurricane shutdown
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