RIE/ICP - Trion - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: David Hays
The Trion etcher is load lock equipped and operated via a touch screen interface. The user may employ either RIE (Reactive Ion Etching) RF power applied at the sample stage or ICP (Inductively Coupled Plasma) RF power applied at the shower head above the sample stage. The system is configured to use both chlorinated and fluorinated gases to perform a wide variety of etch recipes. The following gasses are available for use on the Trion etcher: O2, CHF3, CF4, Ar, BCl3, Cl2, and SF6.

Reactive-Ion Etching wiki link
Plasma Etching wiki link
Microfabrication wiki link
Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Training TopicDescriptionRatesApprox Session Length (hrs)
RIE/ICP Trion TrainingStandard Rate: $21.00/Complete User Training1
Mon, Dec. 25, 2023 9:00 AMMon, Dec. 25, 2023 10:00 AM1 Seats out of 1NRFSign Up
Tue, Jan. 9, 2024 1:30 PMTue, Jan. 9, 2024 2:30 PM1 Seats out of 1NRFSign Up
Mon, Jan. 22, 2024 9:00 AMMon, Jan. 22, 2024 10:00 AM1 Seats out of 1NRFSign Up

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