RIE - Unaxis 790 RIE - Status: Available
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Description: Unaxis 790 Reactive Ion Etcher. Etch Capabilities: SiO2, Si3N4, photoresist, polyimide, dielectrics and other commonly used materials.
Features:
-Process Gases Available: CHF3, CF4, O2, He.
-Substrates up to 8" diameter
-Temperature controlled chamber
-500W RIE
-Manual wafer load.
Reactive-Ion Etching wiki link Plasma Etching wiki link Microfabrication wiki link Latest Status Log EntryMay 31, 2023 - User Note: added oil |
Training Topic | Description | Rates | Approx Session Length (hrs) |
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Unaxis 790 RIE Training | Standard Rate: $21.00/Complete User Training | 1 |
Start | End | Availability | Location | |
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Thu, Jun. 15, 2023 11:00 AM | Thu, Jun. 15, 2023 12:00 PM | 1 Seats out of 1 | NRF | Sign Up |
Tue, Jul. 4, 2023 2:00 PM | Tue, Jul. 4, 2023 3:00 PM | 1 Seats out of 1 | NRF | Sign Up |
Thu, Jul. 13, 2023 11:00 AM | Thu, Jul. 13, 2023 12:00 PM | 1 Seats out of 1 | NRF | Sign Up |
Tue, Aug. 1, 2023 2:00 PM | Tue, Aug. 1, 2023 3:00 PM | 1 Seats out of 1 | NRF | Sign Up |
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