PECVD - Unaxis 790 PECVD - Status: Available
||Unaxis 790 PECVD - Plasma Enhanced Chemical Vapor Deposition System.
PECVD wiki link
Microfabrication wiki link
Latest Status Log EntryNov 22, 2023 - User Note: added water
To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)
Please Note: This tool enforces a 30 minute buffer between reservations. This allows time for staff to prep the tool.
An active Gatorlink login is required to create a new reservation.