PECVD - Unaxis 790 PECVD - Status: Available
|
Unaxis 790 PECVD - Plasma Enhanced Chemical Vapor Deposition System.
PECVD wiki link Microfabrication wiki link Latest Status Log EntryMay 30, 2023 - Resource Status Up - Up. Water added |
Contact Level | Name | |
---|---|---|
1 | Lewis, Bill | walewis@ufl.edu |
2 | Hays, David | dhays@nimet.ufl.edu |
General Contact: rscinfo@mail.ufl.edu
An active Gatorlink login is required to create a new reservation.