Sputter Deposition, AJA - STAFF ONLY - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Hot Processing (166)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
AJA Multi-Source RF and DC Sputter System

Sputter Deposition wiki link
Microfabrication wiki link
Latest Status Log EntryOct 3, 2022 - Resource Status Up - up from shutdown
AJA Sputter Deposition SOPDownload
AJA Sputter RecipesDownload
AJA Sputter_Heater_TempDownload

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