Litho Process BSC-100 Spinner - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $49.50/Hour
    • External Affiliated Commercial/Industrial: $49.50/Hour
    • External Commercial/Industrial: $66.00/Hour
    • External International Academic: $66.00/Hour
    • Internal Standard: $33.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: David Hays
Description: The BSC-100 Spinner is used to manually apply difficult to clean materials such as SU8, spin on glass, ITO, etc.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryMay 30, 2024 - Resource Status Up - up from power down
Contact LevelNameEmail
1Hays, Daviddhays@nimet.ufl.edu
2Lewis, Billwalewis@ufl.edu

General Contact: rscinfo@mail.ufl.edu

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