Litho Process BSC-100 Spinner - Status: Available
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Description: The BSC-100 Spinner is used to manually apply difficult to clean materials such as SU8, spin on glass, ITO, etc.
The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens. Spin Coating wiki link Photolithography wiki link Photoresist wiki link Microfabrication wiki linkLatest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up |
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BSC-100 SOP | Download |
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