Litho Process BSC-100 Spinner - Status: Available

Current Status: Available
Training: View Topics/Sessions
Use Rates:
Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
Building: NANO (0070)
Room: Cleanroom, E Beam (161)
In Cleanroom: Yes
Main Contact: David Hays

Description: The BSC-100 Spinner is used to manually apply difficult to clean materials such as SU8, spin on glass, ITO, etc.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryOct 24, 2022 - Resource Status Up - new spinner ready to use

Capabilities Training Prerequisites Calendar Contacts Docs

Title
BSC-100 SOP	Download

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University of Florida

Research Service Centers

Herbert Wertheim College of Engineering

Litho Process BSC-100 Spinner - Status: Available

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