Litho Process BSC-100 Spinner - Status: Available

Description: The BSC-100 Spinner is used to manually apply difficult to clean materials such as SU8, spin on glass, ITO, etc.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryFeb 1, 2024 - User Note: train Yang Zhang

Use Prerequisites

PrerequisiteDescriptionStatus
Funding SourceRequires permission to an active funding sourceCheck Your Status
Agreement FormRequires completed agreement form for equipment usageCheck Your Status
RSC Safety TrainingRequires completion of safety trainingCheck Your Status

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