Photospectrometer, Filmetrics F40 - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $31.50/Hour
    • External Affiliated Commercial/Industrial: $31.50/Hour
    • External Commercial/Industrial: $42.00/Hour
    • External International Academic: $42.00/Hour
    • Internal Standard: $21.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Bio/Nano Bio Processing (163)
  • In Cleanroom: Yes
  • Main Contact: David Hays
 The Filmetrics F40 is used to measure the thickness and optical constants (n&k) of dielectric and semiconductor thin films. Measured films must be optically smooth and within the range of 30A to 40um.Transmission-vs- wavelength can also be measured if substrate is transparent. Commonly measured films include nitrides, oxides, photoresists, polysilicon, polyimides, cell gaps, etc.

White Light Interferometry wiki link Latest Status Log EntryJan 25, 2024 - User Note: updated all recipes with initial guesses because the new software will not report it in the history tab without that
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