Photospectrometer, Filmetrics F40 - Status: Available

The Filmetrics F40 is used to measure the thickness and optical constants (n&k) of dielectric and semiconductor thin films. Measured films must be optically smooth and within the range of 30A to 40um.Transmission-vs- wavelength can also be measured if substrate is transparent. Commonly measured films include nitrides, oxides, photoresists, polysilicon, polyimides, cell gaps, etc.

White Light Interferometry wiki link Latest Status Log EntryJan 4, 2021 - Resource Status Up - recover from holiday break

Use Prerequisites

Computer AccessRequires computer access be setup
COVID-19 Safety Acknowledgement (Conf)Requires acknowledgement of safety protocols (confirmation version).
COVID-19 Safety Acknowledgement (Form)Requires acknowledgement of safety protocols (form version).
Return to Campus AuthorizationRequires staff confirmation that proof of return to campus authorization was provided.
Funding SourceRequires permission to an active funding source
Work PlanRequires a work plan be approved by PI and staff
Agreement FormRequires completed agreement form for equipment usage
RSC Safety TrainingRequires completion of safety training
NRF Building AccessRequires issue of an id badge and entry badge and/or access level to be set.
Equipment TrainingRequires completion of equipment training

View your prerequisite status for the Photospectrometer, Filmetrics F40.