Photospectrometer, Filmetrics F40 - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $31.50/Hour
    • External Affiliated Commercial/Industrial: $31.50/Hour
    • External Commercial/Industrial: $42.00/Hour
    • External International Academic: $42.00/Hour
    • Internal Standard: $21.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Bio/Nano Bio Processing (163)
  • In Cleanroom: Yes
  • Main Contact: David Hays
 The Filmetrics F40 is used to measure the thickness and optical constants (n&k) of dielectric and semiconductor thin films. Measured films must be optically smooth and within the range of 30A to 40um.Transmission-vs- wavelength can also be measured if substrate is transparent. Commonly measured films include nitrides, oxides, photoresists, polysilicon, polyimides, cell gaps, etc.

White Light Interferometry wiki link Latest Status Log EntryJan 25, 2024 - User Note: updated all recipes with initial guesses because the new software will not report it in the history tab without that
Capabilities Training Prerequisites Calendar Contacts Docs

Use Prerequisites

PrerequisiteDescriptionStatus
Computer AccessRequires computer access be setupCheck Your Status
Funding SourceRequires permission to an active funding sourceCheck Your Status
Work PlanRequires a work plan be approved by PI and staffCheck Your Status
Agreement FormRequires completed agreement form for equipment usageCheck Your Status
RSC Safety TrainingRequires completion of safety trainingCheck Your Status
NRF Building AccessRequires issue of an id badge and entry badge and/or access level to be set.Check Your Status
Equipment TrainingRequires completion of equipment trainingCheck Your Status

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