Photospectrometer, Filmetrics F40 - Status: Available

The Filmetrics F40 is used to measure the thickness and optical constants (n&k) of dielectric and semiconductor thin films. Measured films must be optically smooth and within the range of 30A to 40um.Transmission-vs- wavelength can also be measured if substrate is transparent. Commonly measured films include nitrides, oxides, photoresists, polysilicon, polyimides, cell gaps, etc.

White Light Interferometry wiki link Latest Status Log EntryJan 4, 2021 - Resource Status Up - recover from holiday break
Contact LevelNameEmail
1Hays, Daviddhays@nimet.ufl.edu

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