Heidelberg Laser Writer - Status: Available
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Heidelberg DWL 66FS Maskless Laser Lithography System.
Photolithography wiki link Photoresist wiki link Photolithography wiki link Layout Editor Tutorial Latest Status Log EntryApr 20, 2023 - User Note: 4mm head |
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Equipment Image | Download |
Heidelberg 20mm Exposure Characteristics | Download |
Heidelberg Conversion Manual | Download |
Instructions for photomask CAD file submittal | Download |
Introduction to Layout Editor | Download |
Laser Writer, Heidelberg SOP | Download |
Liftoff - S1813 Image Reversal | Download |
Mask Cost Estimator | Download |
Mask Making Presentation | Download |
NRF Lithography Processes SOP | Download |
Staff Processed Photomask Request | Download |
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