Heidelberg Laser Writer - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Photolithography (165)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
Heidelberg DWL 66FS Maskless Laser Lithography System.

Photolithography wiki link
Photoresist wiki link

Photolithography wiki link
Layout Editor Tutorial
Latest Status Log EntryApr 24, 2024 - User Note: 20mm head
Equipment ImageDownload
Heidelberg 20mm Exposure CharacteristicsDownload
Heidelberg Conversion ManualDownload
Instructions for photomask CAD file submittalDownload
Introduction to Layout EditorDownload
Laser Writer, Heidelberg SOPDownload
Liftoff - S1813 Image ReversalDownload
Mask Cost EstimatorDownload
Mask Making PresentationDownload
NRF Lithography Processes SOPDownload
Staff Processed Photomask RequestDownload

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