Heidelberg Laser Writer - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Photolithography (165)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 Heidelberg DWL 66FS Maskless Laser Lithography System.

Photolithography wiki link
Photoresist wiki link

Photolithography wiki link
Layout Editor Tutorial
Latest Status Log EntryApr 20, 2023 - User Note: 4mm head
Capabilities Training Prerequisites Calendar Contacts Docs
Title
Equipment ImageDownload
Heidelberg 20mm Exposure CharacteristicsDownload
Heidelberg Conversion ManualDownload
Instructions for photomask CAD file submittalDownload
Introduction to Layout EditorDownload
Laser Writer, Heidelberg SOPDownload
Liftoff - S1813 Image ReversalDownload
Mask Cost EstimatorDownload
Mask Making PresentationDownload
NRF Lithography Processes SOPDownload
Staff Processed Photomask RequestDownload

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