Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven - Status: Available
||Description: The E-beam Bay Laurell Spinner is used to manually apply PMMA ONLY. NO OTHER MATERIALS MAY BE USED.
The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.
Spin Coating wiki link
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Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
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