Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $49.50/Hour
    • External Affiliated Commercial/Industrial: $49.50/Hour
    • External Commercial/Industrial: $66.00/Hour
    • External International Academic: $66.00/Hour
    • Internal Standard: $33.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: David Hays
Description: The E-beam Bay Laurell Spinner is used to manually apply PMMA ONLY. NO OTHER MATERIALS MAY BE USED.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Training TopicDescriptionRatesApprox Session Length (hrs)
Spin Coater TrainingStandard Rate: $61.00/Complete User Training2
Wed, Oct. 25, 2023 9:00 AMWed, Oct. 25, 2023 11:30 AM1 Seats out of 1NRFSign Up
Wed, Nov. 8, 2023 9:00 AMWed, Nov. 8, 2023 11:30 AM1 Seats out of 1NRFSign Up
Thu, Nov. 9, 2023 1:30 PMThu, Nov. 9, 2023 4:00 PM1 Seats out of 1NRFSign Up
Wed, Nov. 22, 2023 9:00 AMWed, Nov. 22, 2023 11:30 AM1 Seats out of 1NRFSign Up

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