Litho Process Headway E-Beam Bay & Hot Plate/Oven - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $48.00/Hour
    • External Affiliated Commercial/Industrial: $48.00/Hour
    • External Commercial/Industrial: $64.00/Hour
    • External International Academic: $64.00/Hour
    • Internal Standard: $32.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: David Hays
 SU8 and other non-standard resist designated spinner.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

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SU8 designated spinner.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.