Litho Process Headway E-Beam Bay & Hot Plate/Oven - Status: Available
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SU8 and other non-standard resist designated spinner.
The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens. Spin Coating wiki link Photolithography wiki link Photoresist wiki link Microfabrication wiki linkLatest Status Log EntryJan 4, 2021 - Resource Status Up - up from shutdown |
SU8 designated spinner.
The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.