Litho Process Headway E-Beam Bay & Hot Plate/Oven - Status: Down
|SU8 and other non-standard resist designated spinner.
The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.
Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryOct 12, 2022 - Resource Status Down - replacing with a different model spinner
|Litho Process, Headway E-Beam Bay & Hot Plate/Oven SOP
|NRF Lithography Processes SOP
An active Gatorlink login is required to create a new reservation.