Litho Process Headway E-Beam Bay & Hot Plate/Oven - Status: Down

  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $49.50/Hour
    • External Affiliated Commercial/Industrial: $49.50/Hour
    • External Commercial/Industrial: $66.00/Hour
    • External International Academic: $66.00/Hour
    • Internal Standard: $33.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: David Hays
SU8 and other non-standard resist designated spinner.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryOct 12, 2022 - Resource Status Down - replacing with a different model spinner
Training TopicDescriptionRatesApprox Session Length (hrs)
Spin Coater TrainingStandard Rate: $61.00/Complete User Training2
StartEndAvailabilityLocation
Wed, Jun. 19, 2024 9:00 AMWed, Jun. 19, 2024 11:30 AM1 Seats out of 1NRFSign Up
Thu, Jun. 20, 2024 1:30 PMThu, Jun. 20, 2024 4:00 PM1 Seats out of 1NRFSign Up
Wed, Jul. 3, 2024 9:00 AMWed, Jul. 3, 2024 11:30 AM1 Seats out of 1NRFSign Up
Wed, Jul. 17, 2024 9:00 AMWed, Jul. 17, 2024 11:30 AM1 Seats out of 1NRFSign Up
Thu, Jul. 18, 2024 1:30 PMThu, Jul. 18, 2024 4:00 PM1 Seats out of 1NRFSign Up

To request a training session at a custom date & time, please click an option below.

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