Litho Process Headway E-Beam Bay & Hot Plate/Oven - Status: Down
  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $49.50/Hour
    • External Affiliated Commercial/Industrial: $49.50/Hour
    • External Commercial/Industrial: $66.00/Hour
    • External International Academic: $66.00/Hour
    • Internal Standard: $33.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: David Hays
 SU8 and other non-standard resist designated spinner.

The use of photoresist support equipment (not tracked/ charged) is built into the spinner charge rate. Support equipment includes: HMDS hotplate, soft bake hotplates, hard bake hotplates and ovens.

Spin Coating wiki link
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki link
Capabilities Training Prerequisites Calendar Contacts Docs
Training TopicDescriptionRatesApprox Session Length (hrs)
Spin Coater TrainingStandard Rate: $61.00/Complete User Training2
StartEndAvailabilityLocation
Wed, Aug. 14, 2024 9:00 AMWed, Aug. 14, 2024 11:30 AM1 Seats out of 1NRFSign Up
Thu, Aug. 15, 2024 1:30 PMThu, Aug. 15, 2024 4:00 PM1 Seats out of 1NRFSign Up
Wed, Aug. 28, 2024 9:00 AMWed, Aug. 28, 2024 11:30 AM1 Seats out of 1NRFSign Up
Wed, Sep. 11, 2024 9:00 AMWed, Sep. 11, 2024 11:30 AM1 Seats out of 1NRFSign Up
Thu, Sep. 12, 2024 1:30 PMThu, Sep. 12, 2024 4:00 PM1 Seats out of 1NRFSign Up
Wed, Sep. 25, 2024 9:00 AMWed, Sep. 25, 2024 11:30 AM1 Seats out of 1NRFSign Up

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