Raith 150, e-beam lithography - Status: Down

  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $46.50/Hour
    • External Affiliated Commercial/Industrial: $46.50/Hour
    • External Commercial/Industrial: $62.00/Hour
    • External International Academic: $62.00/Hour
    • Internal Standard: $31.00/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, E Beam (161)
  • In Cleanroom: Yes
  • Main Contact: Andres Trucco
The RAITH150 is a multipurpose tool capable of direct e-beam exposure, wafer scale process development at suboptical resolution. The system includes integrated linewidth and metrology functions which give the user the ability to optimize process reproducibility. In addition the SEM side can be used to obtain large high magnification tiled images by taking advantage of the high resolution interferometer stage.

Electron Beam Lithography wiki link
Photoresist wiki link
E-beam resist wiki link
Microfabrication wiki link


This is a staff run only resource. Latest Status Log EntryMay 30, 2024 - Resource Status Down - power failure

To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)

Calendar ICS Path

An active Gatorlink login is required to create a new reservation.