Sputter Deposition, KJL CMS-18 Multi-Source - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
Kurt J. Lesker Multi-Source RF and DC Sputter System.

Sputter Deposition wiki link
Microfabrication wiki link
Latest Status Log EntryApr 12, 2024 - User Note: targets...NiO, Ti, NiO, Cu

To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)

RESERVATION POLICIES:
EMAIL OR CALL STAFF IF YOU MAKE A RESERVATION LESS THAN 4 HOURS AWAY OR IT MAY NOT GET LOADED.
REACTIVE RECIPE TARGETS REQUIRE A ONE DAY ADVANCED RESERVATION SCHEDULED FOR 8AM.
DON'T FORGET TO CANCEL YOUR RESERVATION IF YOUR TARGET DOES NOT GET LOADED OR YOU WILL INCUR A RESOURCE TRANSACTION CHARGE.

Please Note: This tool enforces a 60 minute buffer between reservations. The buffer allows time for target changes.

Calendar ICS Path

An active Gatorlink login is required to create a new reservation.