Sputter Deposition, KJL CMS-18 Multi-Source - Status: Available
||Kurt J. Lesker Multi-Source RF and DC Sputter System.
Sputter Deposition wiki link
Microfabrication wiki link
Latest Status Log EntryMay 30, 2023 - User Note: targets...W, Ti, Cu, Au
To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)
EMAIL OR CALL STAFF IF YOU MAKE A RESERVATION LESS THAN 4 HOURS AWAY OR IT MAY NOT GET LOADED.
REACTIVE RECIPE TARGETS REQUIRE A ONE DAY ADVANCED RESERVATION SCHEDULED FOR 8AM.
DON'T FORGET TO CANCEL YOUR RESERVATION IF YOUR TARGET DOES NOT GET LOADED OR YOU WILL INCUR A RESOURCE TRANSACTION CHARGE.
Please Note: This tool enforces a 60 minute buffer between reservations. The buffer allows time for target changes.
An active Gatorlink login is required to create a new reservation.