Sputter Deposition, KJL CMS-18 Multi-Source - Status: In Use
  • Current Status: In Use
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
 Kurt J. Lesker Multi-Source RF and DC Sputter System.

Sputter Deposition wiki link
Microfabrication wiki link
Latest Status Log EntryJun 8, 2023 - User Note: Co, Ti, Cu, Au
Capabilities Training Prerequisites Calendar Contacts Docs
Training TopicDescriptionRatesApprox Session Length (hrs)
Sputter Deposition KJL TrainingStandard Rate: $74.00/Complete User Training2
StartEndAvailabilityLocation
Mon, Jun. 12, 2023 9:00 AMMon, Jun. 12, 2023 11:00 AM1 Seats out of 1Sign Up
Thu, Jun. 22, 2023 9:00 AMThu, Jun. 22, 2023 11:00 AM1 Seats out of 1Sign Up
Mon, Jun. 26, 2023 9:00 AMMon, Jun. 26, 2023 11:00 AM1 Seats out of 1Sign Up
Thu, Jul. 6, 2023 9:00 AMThu, Jul. 6, 2023 11:00 AM1 Seats out of 1Sign Up
Mon, Jul. 10, 2023 9:00 AMMon, Jul. 10, 2023 11:00 AM1 Seats out of 1Sign Up
Thu, Jul. 20, 2023 9:00 AMThu, Jul. 20, 2023 11:00 AM1 Seats out of 1Sign Up
Mon, Jul. 24, 2023 9:00 AMMon, Jul. 24, 2023 11:00 AM1 Seats out of 1Sign Up
Thu, Aug. 3, 2023 9:00 AMThu, Aug. 3, 2023 11:00 AM1 Seats out of 1Sign Up
Mon, Aug. 7, 2023 9:00 AMMon, Aug. 7, 2023 11:00 AM1 Seats out of 1Sign Up

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