Sputter Deposition, KJL CMS-18 Multi-Source - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: Marco Downing
 Kurt J. Lesker Multi-Source RF and DC Sputter System.

Sputter Deposition wiki link
Microfabrication wiki link
Latest Status Log EntryApr 18, 2024 - User Note: targets...W, Ti, Cu, Pt
Capabilities Training Prerequisites Calendar Contacts Docs
Title
4" wafer holder temperature calibrationDownload
Equipment ImageDownload
Sputter Consumables SurchargeDownload
Sputter Deposition, KJL CMS-18 Multi-Source SOPDownload
Standard holder temperature calibrationDownload

An active Gatorlink login is required to create a new reservation.