PECVD - STS 310PC SiO2 - SiN - Amorphous Si - Status: Available
||STS 310PC - Plasma Enhanced Chemical Vapor Deposition System.
PECVD wiki link
Microfabrication wiki link
Latest Status Log EntryJun 1, 2023 - User Note: replaced computer box fan
To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)
An active Gatorlink login is required to create a new reservation.