PECVD - STS 310PC SiO2 - SiN - Amorphous Si - Status: Available
|
STS 310PC - Plasma Enhanced Chemical Vapor Deposition System.
PECVD wiki link Microfabrication wiki link Latest Status Log EntryJan 19, 2024 - Resource Status Up - chamber clean complete |
An active Gatorlink login is required to create a new reservation.