PECVD - STS 310PC SiO2 - SiN - Amorphous Si - Status: Available
  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: David Hays
 STS 310PC - Plasma Enhanced Chemical Vapor Deposition System.

PECVD wiki link
Microfabrication wiki link
Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up
Capabilities Training Prerequisites Calendar Contacts Docs
Title
Equipment ImageDownload
STS 310 PECVD Film PropertiesDownload
STS PECVD SOPDownload

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