PECVD - STS 310PC SiO2 - SiN - Amorphous Si - Status: Down

  • Current Status: Down
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Film Deposition (164)
  • In Cleanroom: Yes
  • Main Contact: David Hays
STS 310PC - Plasma Enhanced Chemical Vapor Deposition System.

PECVD wiki link
Microfabrication wiki link
Contact LevelNameEmail
1Hays, Daviddhays@nimet.ufl.edu
2Lewis, Billwalewis@ufl.edu

General Contact: rscinfo@mail.ufl.edu

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