PECVD - STS 310PC SiO2 - SiN - Amorphous Si - Status: Available
|
STS 310PC - Plasma Enhanced Chemical Vapor Deposition System.
PECVD wiki link Microfabrication wiki link Latest Status Log EntrySep 14, 2023 - Resource Status Up - exhaust is back...tool is back up |
Contact Level | Name | |
---|---|---|
1 | Hays, David | dhays@nimet.ufl.edu |
2 | Lewis, Bill | walewis@ufl.edu |
General Contact: rscinfo@mail.ufl.edu
An active Gatorlink login is required to create a new reservation.