RIE/ICP - Unaxis SLR - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $74.25/Hour
    • External Affiliated Commercial/Industrial: $74.25/Hour
    • External Commercial/Industrial: $99.00/Hour
    • External International Academic: $99.00/Hour
    • Internal Standard: $49.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Dry Etch (162)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
Description: Unaxis Shuttlelock Reactive Ion Etcher with Inductively Coupled Plasma Module. Etch Capabilities: SiO2, Si3N4, photoresist, polyimide, Al, dielectrics and other commonly used materials. Features: -Process Gases Available: SF6, CL2, CHF3, O2, Ar, H2, CH4, N2 -Wafer Clamping and He backside cooling- For 4” wafers only. Pieces smaller than 75mm may be processed without backside cooling. -Temperature controlled chamber -2KW ICP, 600W RIE -Automatic wafer load via load lock

Reactive-Ion Etching wiki link
Plasma Etching wiki link
Microfabrication wiki link
Latest Status Log EntryJun 6, 2023 - Resource Status Up - Flushed chiller lines with clr Tool only.
Training TopicDescriptionRatesApprox Session Length (hrs)
RIE/ICP Unaxis SLR TrainingStandard Rate: $30.00/Complete User Training1
Tue, Jun. 13, 2023 9:00 AMTue, Jun. 13, 2023 10:00 AM1 Seats out of 1NRFSign Up
Wed, Jun. 28, 2023 1:30 PMWed, Jun. 28, 2023 2:30 PM1 Seats out of 1NRFSign Up
Tue, Jul. 11, 2023 9:00 AMTue, Jul. 11, 2023 10:00 AM1 Seats out of 1NRFSign Up
Wed, Jul. 26, 2023 1:30 PMWed, Jul. 26, 2023 2:30 PM1 Seats out of 1NRFSign Up
Tue, Aug. 8, 2023 9:00 AMTue, Aug. 8, 2023 10:00 AM1 Seats out of 1NRFSign Up

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