Litho Process EVG Model 620 w/BSA - Status: Available
||The EVG 620 is a double-side mask aligner and it can be used for UV lithography on wafers of sizes up to 150mm.
The lamp is OFF (contact Staff if you need to use the tool)
Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryMay 23, 2023 - User Note: adjust lamp ci to 20mw
To select the time for your reservation, click on the calendar at the desired start time and drag to the desired end time. If you are logged in, the reservations will display the names of the reservation users. Note: If the calendar is down, the following link may also be used to create a reservation: Create Reservation (Quick Form)
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