Litho Process EVG Model 620 w/BSA - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Photolithography (165)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
The EVG 620 is a double-side mask aligner and it can be used for UV lithography on wafers of sizes up to 150mm.

The lamp is OFF (contact Staff if you need to use the tool)

Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryMay 23, 2023 - User Note: adjust lamp ci to 20mw
Equipment ImageDownload
Litho Process EVG Model 620 w/BSA SOPDownload
NRF Lithography Processes SOPDownload

An active Gatorlink login is required to create a new reservation.