Litho Process EVG Model 620 w/BSA - Status: Available

  • Current Status: Available
  • Training: View Topics/Sessions
  • Use Rates:
    • External Academic & Government: $68.25/Hour
    • External Affiliated Commercial/Industrial: $68.25/Hour
    • External Commercial/Industrial: $91.00/Hour
    • External International Academic: $91.00/Hour
    • Internal Standard: $45.50/Hour
  • Service: Request Service Quote. The Staff rate is $50/hour (Internal) and $55 /hour (External) in addition to the instrument rate.
  • Building: NANO (0070)
  • Room: Cleanroom, Photolithography (165)
  • In Cleanroom: Yes
  • Main Contact: Bill Lewis
The EVG 620 is a double-side mask aligner and it can be used for UV lithography on wafers of sizes up to 150mm.

The lamp is OFF (contact Staff if you need to use the tool)

Photolithography wiki link
Photoresist wiki link
Microfabrication wiki linkLatest Status Log EntryMay 23, 2023 - User Note: adjust lamp ci to 20mw
Training TopicDescriptionRatesApprox Session Length (hrs)
Mask Aligner EVG TrainingStandard Rate: $82.00/Complete User Training2
Fri, Jun. 23, 2023 9:00 AMFri, Jun. 23, 2023 11:00 AM1 Seats out of 1NRFSign Up
Thu, Jul. 6, 2023 1:00 PMThu, Jul. 6, 2023 3:00 PM1 Seats out of 1NRFSign Up
Fri, Jul. 21, 2023 9:00 AMFri, Jul. 21, 2023 11:00 AM1 Seats out of 1NRFSign Up
Thu, Aug. 3, 2023 1:00 PMThu, Aug. 3, 2023 3:00 PM1 Seats out of 1NRFSign Up

To request a training session at a custom date & time, please click an option below.

Request and Sign Up for Priority Mask Aligner EVG Training

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