Equipment by Name

To reserve equipment time, or to view more information about an equipment, click on the equipment name. Visit the Equipment Rates page for our equipment rate schedule.

Name Status Keywords
4 Point Probe Station Available Metrology
ALD - Cambridge Nano Fiji 200 Available Film Deposition
Allied Multi-prep Lapping and Polishing system Available Other
Amerimade Bench BOE/HF Available Wet Processing
Amerimade Bench SC1/SC2 Available Wet Processing
Asher - Anatech Barrel SCE600 Available Plasma
Asher - Tepla M4L Available Plasma
Autosorb iQ - Analysis (Ar, CO2, He) Available Porosimetry/Porometry/Surfa...
Autosorb iQ - Krypton Available Porosimetry/Porometry/Surfa...
Autosorb iQ - Outgassing (monitor) Available Porosimetry/Porometry/Surfa...
Bruker Optical Profilometer Available Metrology, Surface Analysis...
Cameca SX Five FE EPMA Down Electron Microscopy/Microan...
Coater - Carbon Available Other
Coater - Hummer V Au-Pd Available Other
Coater - SPI Au-Pd Available Other
Coulter LS13320 Available Particle Analysis/Character...
Critical Point Dryer Available Wet Processing
Dicing Saws- ADT Available Dicing/Bonding
DRIE - Deep RIE, STS Available Plasma
DRIE - Oxford Plasma Pro Available Plasma
E-beam evaporator, PVD Available Film Deposition
EDAX EDS/EBSD on FEI Helios NanoLab 600 dual beam FIB/SEM Down Electron Microscopy/Microan...
Electronic Measurement, Lakeshore 7507 Available Metrology
Ellipsometer, J.A. Woolam Available Metrology, Surface Analysis...
FIB - FEI Helios G4 PFIB CXe dual beam FIB/SEM Available Electron Microscopy/Microan...
FIB - FEI Helios NanoLab 600 dual beam FIB/SEM Available Electron Microscopy/Microan...
Flexus 2320 Available Metrology
FTIR/FTIR Microscope - ThermoFisher iS50 Available Spectroscopy
Furnace Tube, Thermcraft, General Hot Process Available Hot Processing
Furnace Tube, Tystar #1 Wet and dry Ox Available Hot Processing
General Acids/Bases Bench-Left Available Wet Processing
Heidelberg Laser Writer Down Photolithography
Horiba microRaman Available Metrology, Spectroscopy
JCPDS Computer Available X-Ray Analysis/Characteriza...
JST Wet Bench Available Wet Processing
K&S 4124 Ball Bonder, Gold Ball Available Dicing/Bonding
K&S 4700 Wedge Bonder (Staff Run) Available Dicing/Bonding
Labconco Triad Freeze Dryer In Use Sample Preparation
Litho Process EVG Model 620 w/BSA Available Photolithography
Litho Process Headway E-Beam Bay & Hot Plate/Oven Available Photolithography
Litho Process Karl Suss MA6 Available Photolithography
Litho Process Laurell Litho Bay & Hot Plate/Oven Available Photolithography
Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven Available Photolithography
Litho Process Suss Delta 20 & Hot Plate Available Photolithography
Litho Process Suss Delta 80 & Hot Plate/Oven Available Photolithography
Malvern Zetasizer Ultra Available Particle Analysis/Character...
Nano-CT - GE v|tome|x m 240 Available X-Ray Analysis/Characteriza...
Nano-CT Image Processing/Reconstruction System Available X-Ray Analysis/Characteriza...
Nikon LV100 Microscope Available Metrology
Objet 3D Printer Available 3D Printing
Oven, YES, Image Reversal/HMDS Available Photolithography
Paar Physica Electro Kinetic Analyzer Down Particle Analysis/Character...
Panalytical XPert MRD Down X-Ray Analysis/Characteriza...
Panalytical XPert Powder Available X-Ray Analysis/Characteriza...
PDMS Process Tools - Room 235 Available Other
PDMS-Spinner Available Other
PECVD - STS 310PC SiO2 - SiN - Amorphous Si Available Film Deposition
PECVD - Unaxis 790 PECVD Available Film Deposition
Perkin-Elmer PHI 660 - AES Down Surface Analysis/Characteri...
Photospectrometer, Filmetrics F40 Available Metrology
Profilometer, Dektak 150 Available Metrology
Profilometer, Tencor AS500 Available Metrology
Quantachrome PoreMaster Mercury Porosimeter Available Porosimetry/Porometry/Surfa...
Quantachrome Porometer 3g zh Available Porosimetry/Porometry/Surfa...
Quantachrome Ultrapyc 1000 Gas Pycnometer Available Porosimetry/Porometry/Surfa...
Raith 150, e-beam lithography Down Photolithography
Rheometer - ARES LS1 Available Other Analytical Techniques
RIE - Unaxis 790 RIE Available Plasma
RIE/ICP - Trion Available Plasma
RIE/ICP - Unaxis SLR Available Plasma
RTA, SSI Solaris 150 Available Hot Processing
RTA, Steag 100CS RTP Available Hot Processing
SCS Parylene Coater Available Film Deposition
SEM - FEI Nova 430 w/EDS & CL Available Electron Microscopy/Microan...
SEM - Hitachi S-3000 Available Electron Microscopy/Microan...
SEM - JEOL 5700 Available Metrology
SEM - Tescan MIRA3 Available Electron Microscopy/Microan...
Solvent Bench #1 Lift Off Available Wet Processing
Solvent Bench #1 PR Strip Available Wet Processing
Solvent Bench 2 - hot plate and workspace Up Wet Processing
Spin Dryer - Sitek Available Other
SPM/AFM Dimension 3100 Available Surface Analysis/Characteri...
Sputter Deposition, AJA Down Film Deposition
Sputter Deposition, KJL CMS-18 Multi-Source Available Film Deposition
TEM - FEI Talos F200i S/TEM Available Electron Microscopy/Microan...
TEM - FEI Tecnai F20 S/TEM Available Electron Microscopy/Microan...
TEM - FEI Themis Z S/TEM Down Electron Microscopy/Microan...
TSI PSD 3603 (Aerosizer) Down Particle Analysis/Character...
UV/Vis - Perkin-Elmer Lambda 800 Available Spectroscopy
Versa software workstation Available Other
Wafer Bonder, EVG 501 Available Dicing/Bonding
Xnovo software workstation Available Other
XPS - ULVAC-PHI XPS Available Surface Analysis/Characteri...
XRay Software Remote Workstation Up X-Ray Analysis/Characteriza...
Zeiss Microscope Available Other
ZEISS Versa 620 XRM In Use X-Ray Analysis/Characteriza...