Equipment by Room

To reserve equipment time, or to view more information about an equipment, click on the equipment name. Visit the Equipment Rates page for our equipment rate schedule.

Room Name Status Keywords
Device Assembly & Processing (122) Allied Multi-prep Lapping and Polishing system Available Other
Device Assembly & Processing (122) Dicing Saws- ADT Available Dicing/Bonding
Device Assembly & Processing (122) Electronic Measurement, Lakeshore 7507 Available Metrology
Device Assembly & Processing (122) Ellipsometer, J.A. Woolam Available Metrology, Surface Analysis...
Device Assembly & Processing (122) K&S 4700 Wedge Bonder (Staff Run) Available Dicing/Bonding
Device Assembly & Processing (122) RTA, SSI Solaris 150 Down Hot Processing
Dual-Beam Fib (132) FIB - FEI Helios G4 PFIB CXe dual beam FIB/SEM Available Electron Microscopy/Microan...
FE Sem (134) SEM - FEI Nova 430 w/EDS & CL Available Electron Microscopy/Microan...
General Char (131) ZEISS Versa 620 XRM Available X-Ray Analysis/Characteriza...
Microscopy Sample Prep (125) 4 Point Probe Station Available Metrology
Microscopy Sample Prep (125) K&S 4124 Ball Bonder, Gold Ball Available Dicing/Bonding
Microscopy Sample Prep (125) Profilometer, Tencor AS500 Available Metrology
Microscopy Sample Prep (125) SCS Parylene Coater Available Film Deposition
SPM (137) Horiba microRaman Available Metrology, Spectroscopy
SPM (137) TEM - FEI Themis Z S/TEM Available Electron Microscopy/Microan...
2nd Floor Conference Room (283) XRay Software Remote Workstation Up X-Ray Analysis/Characteriza...
Advanced Manufacturing Lab (235) Objet 3D Printer Down 3D Printing
Advanced Manufacturing Lab (235) PDMS Process Tools - Room 235 Available Other
Advanced Manufacturing Lab (235) PDMS-Spinner Down Other
Cleanroom, Bio/Nano Bio Processing (163) Flexus 2320 Available Metrology
Cleanroom, Bio/Nano Bio Processing (163) Nikon LV100 Microscope Available Metrology
Cleanroom, Bio/Nano Bio Processing (163) Photospectrometer, Filmetrics F40 Available Metrology
Cleanroom, Bio/Nano Bio Processing (163) Unaxis 790 RIE Available Plasma
Cleanroom, Dry Etch (162) Asher - Anatech Barrel SCE600 Available Plasma
Cleanroom, Dry Etch (162) Asher - Tepla M4L Available Plasma
Cleanroom, Dry Etch (162) DRIE - Deep RIE, STS Available Plasma
Cleanroom, Dry Etch (162) DRIE - Oxford Plasma Pro Available Plasma
Cleanroom, Dry Etch (162) Profilometer, Dektak 150 Available Metrology
Cleanroom, Dry Etch (162) RIE/ICP, Unaxis SLR Available Plasma
Cleanroom, Dry Etch (162) Trion RIE/ICP Down Plasma
Cleanroom, E Beam (161) Litho Process Headway E-Beam Bay & Hot Plate/Oven Available Photolithography
Cleanroom, E Beam (161) Litho Process Laurell Spinner E-Beam Bay & Hot Plate/Oven Available Photolithography
Cleanroom, E Beam (161) Litho Process Suss Delta 20 & Hot Plate Available Photolithography
Cleanroom, E Beam (161) Raith 150, e-beam lithography Available Photolithography
Cleanroom, E Beam (161) SEM - JEOL 5700 Available Metrology
Cleanroom, Film Deposition (164) ALD - Cambridge Nano Fiji 200 Available Film Deposition
Cleanroom, Film Deposition (164) E-beam evaporator, PVD Available Film Deposition
Cleanroom, Film Deposition (164) PECVD - STS 310PC SiO2 - SiN - Amorphous Si Available Film Deposition
Cleanroom, Film Deposition (164) PECVD - Unaxis 790 PECVD Available Film Deposition
Cleanroom, Film Deposition (164) Sputter Deposition, KJL CMS-18 Multi-Source Available Film Deposition
Cleanroom, Hot Processing (166) Amerimade Bench BOE/HF Available Wet Processing
Cleanroom, Hot Processing (166) Amerimade Bench SC1/SC2 Available Wet Processing
Cleanroom, Hot Processing (166) Furnace Tube, Thermcraft, General Hot Process Available Hot Processing
Cleanroom, Hot Processing (166) Furnace Tube, Tystar #1 Wet and dry Ox Available Hot Processing
Cleanroom, Hot Processing (166) RTA, Steag 100CS RTP Available Hot Processing
Cleanroom, Hot Processing (166) Sputter Deposition, AJA Down Film Deposition
Cleanroom, Hot Processing (166) Wafer Bonder, EVG 501 Down Hot Processing
Cleanroom, Photolithography (165) Heidelberg Laser Writer Available Photolithography
Cleanroom, Photolithography (165) Litho Process EVG Model 620 w/BSA Down Photolithography
Cleanroom, Photolithography (165) Litho Process Karl Suss MA6 Available Photolithography
Cleanroom, Photolithography (165) Litho Process Laurell Litho Bay & Hot Plate/Oven Available Photolithography
Cleanroom, Photolithography (165) Litho Process Suss Delta 80 & Hot Plate/Oven Available Photolithography
Cleanroom, Photolithography (165) Oven, YES, Image Reversal/HMDS Available Photolithography
Cleanroom, Photolithography (165) Zeiss Microscope Available Other
Cleanroom, Wet Processing (167) Critical Point Dryer Available Wet Processing
Cleanroom, Wet Processing (167) General Acids/Bases Bench-Left Available Wet Processing
Cleanroom, Wet Processing (167) JST Wet Bench Available Wet Processing
Cleanroom, Wet Processing (167) Solvent Bench #1 Lift Off Available Wet Processing
Cleanroom, Wet Processing (167) Solvent Bench #1 PR Strip Available Wet Processing
Cleanroom, Wet Processing (167) Solvent Bench 2 - hot plate and workspace Up Wet Processing
Cleanroom, Wet Processing (167) Spin Dryer - Sitek Available Other
EPMA Lab (285) Cameca SX Five FE EPMA Available Electron Microscopy/Microan...
EPMA Lab (285) SEM - Tescan MIRA3 Available Electron Microscopy/Microan...
FIB Room (136) TEM - FEI Talos F200i S/TEM Down Electron Microscopy/Microan...
Nano-CT Room (128) Nano-CT - GE v|tome|x m 240 Available X-Ray Analysis/Characteriza...
Nano-CT Room (128) Nano-CT Image Processing/Reconstruction System Available X-Ray Analysis/Characteriza...
Particle Analysis 1 (222) Autosorb iQ - Analysis (Ar, CO2, He) Available Porosimetry/Porometry/Surfa...
Particle Analysis 1 (222) Autosorb iQ - Chemi analysis (H2) Up Porosimetry/Porometry/Surfa...
Particle Analysis 1 (222) Autosorb iQ - Krypton Available Porosimetry/Porometry/Surfa...
Particle Analysis 1 (222) Autosorb iQ - Outgassing (monitor) Available Porosimetry/Porometry/Surfa...
Particle Analysis 1 (222) Bruker Optical Profilometer Available Metrology, Surface Analysis...
Particle Analysis 1 (222) FTIR/FTIR Microscope - ThermoFisher iS50 Available Spectroscopy
Particle Analysis 1 (222) Quantachrome Porometer 3g zh Available Porosimetry/Porometry/Surfa...
Particle Analysis 1 (222) Quantachrome Ultrapyc 1000 Gas Pycnometer Available Porosimetry/Porometry/Surfa...
Particle Analysis 1 (222) Rheometer - ARES LS1 Available Other Analytical Techniques
Particle Analysis 2 (224) Labconco Triad Freeze Dryer In Use Sample Preparation
Particle Analysis 2 (224) Paar Physica Electro Kinetic Analyzer Down Particle Analysis/Character...
Particle Analysis 2 (224) TSI PSD 3603 (Aerosizer) Available Particle Analysis/Character...
Particle Analysis 3 (228) Coater - Carbon Down Other
Particle Analysis 3 (228) Coater - Hummer V Au-Pd Available Other
Particle Analysis 3 (228) Coater - SPI Au-Pd Available Other
Particle Analysis 3 (228) SEM - Hitachi S-3000 Available Electron Microscopy/Microan...
Particle Analysis 4 (239) Coulter LS13320 Available Particle Analysis/Character...
Particle Analysis 4 (239) Malvern Zetasizer Ultra Available Particle Analysis/Character...
Particle Analysis 4 (239) Quantachrome PoreMaster Mercury Porosimeter Available Porosimetry/Porometry/Surfa...
Particle Analysis 4 (239) SPM/AFM Dimension 3100 Available Surface Analysis/Characteri...
Particle Analysis 4 (239) UV/Vis - Perkin-Elmer Lambda 800 Available Spectroscopy
Room (8B) FIB - FEI Helios NanoLab 600 dual beam FIB/SEM Down Electron Microscopy/Microan...
Room (8E) EDAX EDS/EBSD on FEI Helios NanoLab 600 dual beam FIB/SEM Available Electron Microscopy/Microan...
Room (8E) TEM - FEI Tecnai F20 S/TEM Available Electron Microscopy/Microan...
Surface Analysis Lab (248) Perkin-Elmer PHI 660 - AES Down Surface Analysis/Characteri...
Surface Analysis Lab (248) XPS - ULVAC-PHI XPS Available Surface Analysis/Characteri...
Unspecified Al Ogden Up Other
X-Ray Diffraction Lab (233) JCPDS Computer Available X-Ray Analysis/Characteriza...
X-Ray Diffraction Lab (233) Panalytical XPert MRD Available X-Ray Analysis/Characteriza...
X-Ray Diffraction Lab (233) Panalytical XPert Powder Available X-Ray Analysis/Characteriza...